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<Integration and Measurement of Electronic Devices>

Maskless lithography

Semiconductor Parameter Analyzer
HP4145B with Labview

Clean bench

Thermal evaporator

Semiconductor Parameter Analyzer Keithley 4200SCS

Glovebox system

Sputtering system

Probe Station

LCR meter

UV ozone tretment

Tube furnace

Spin coator
<Synthesis and Post Process of Metallic Nanosheet>

Hydrothermal reactor

Freeze dryer


Desiccator / DI water

Tube furnace (CVD)

Micro balance

Glovebox system

Oven

Ultrasonicator

Fume hood 1

4-point probe measurement

Fume hood 2

Optical microscopy
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Bar coator
<Electrochemical analysis and Processing>

Glovebox system
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